Linear & Robot System 
					
	
		
			- A key component all display and semiconductor process equipment requires
 
		
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	Linear Motor
	
		Applicable to the various area that requires precise linear movement
		
			- Factory Automation, object transport system, semiconductor manufacturing equipment,Next generation elevator, monorail, medical equipment, etc
 
		
		Principles of Linear motor driving
		
		Linear motor system
		
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Semiconductor Granite Precision XY Table
				 
			 
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High Precision Air Bearing Stage
				 
			 
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High Precision Air Bearing Stage
				 
			 
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Multi-slide Linear Stage
				 
			 
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Multi – axis Module System
				 
			 
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Mobile/Display/ Semiconductor Align Stage