FA Business
ALD too for Solar cell
- ALD (Atomic Layer Deposition) system for Solar Cell
- HVM ALD System for LARGE SIZE rigid panel (ex. CIGS PV)
- Buffer layer deposition
- High-throughput (>100 panels / System *hr) :
- 1 System has 8 chamber
- 1 chamber has 10 panel loading.(but variable up to 15 panels per requirement)