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alti-hightech
Protox
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      • Secondary Battery
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      • About AMR
      • Compare AMR with AGV
      • Introduction of AMR Product
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    대표이사 인사말
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    • 회사개요
    • 비젼 & 미션 & 직장관
    • 조직도
    • 주요연혁
    • CI (Corporation Identity)
    계열사
    오시는길
  • FA Business
    SYSTEM Business
    • Secondary Battery
    • Lamination
    • Notching & E-Cutter
    • Separator Laser Cutting
    • Display
    • PCB Bonder / FOB Bonder
    • TAB Bonder / COF Bonder
    • FPC / FOG Bonder
    • 검사기/수지도포기
    • Ag(銀) Dotting System
    • Loader/Unloader
    • Laser Marking System
    • Laser Marking & 2D Label 발행기
    • Others
    • Solar Cell 용 ALD TOOL
    • UV 경화기
    PROBE Business
    • Auto Probe Station
    • Auto Prober Unit
    LINEAR Business
    • Linear
    • Linear & Robot System
    • DD Motor
    • AMR
    • About AMR
    • Compare AMR with AGV
    • Introduction of AMR Product
  • 투자정보
    공시
    주가정보
    • 재무종합
    • 내부정보관리규정
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    공지사항
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    • LINEAR사업부

FA Business

Home
  • FA Business
  • SYSTEM Business
  • Solar Cell 용 ALD TOOL
    • PCB Bonder / FOB Bonder
    • TAB Bonder / COF Bonder
    • FPC / FOG Bonder
    • 검사기/수지도포기
    • Ag(銀) Dotting System
    • Loader/Unloader
    • Laser Marking System
    • Laser Marking & 2D Label 발행기
    • Solar Cell 용 ALD TOOL
    • UV 경화기
    • Lamination
    • Notching & E-Cutter
    • Separator Laser Cutting

Solar Cell 용 ALD TOOL

FA BUSINESS

  • SYSTEM Business

    • Secondary Battery

      • Lamination
      • Notching & E-Cutter
      • Separator Laser Cutting

    • Display

      • PCB Bonder / FOB Bonder
      • TAB Bonder / COF Bonder
      • 검사기/수지도포기
      • Ag(銀) Dotting System
      • Loader/Unloader
      • Laser Marking System
      • Laser Marking & 2D Label 발행기

    • Others

      • Solar Cell 용 ALD TOOL
      • UV 경화기

  • PROBE Business

      • Auto Probe Station
      • Auto Prober Unit

  • LINEAR Business

    • Linear

      • Linear & Robot System
      • DD Motor

    • AMR

      • About AMR
      • Compare AMR with AGV
      • Introduction of AMR Product
iOV M5000 ALD System for Large Glass Deposition
Atomic Layer Deposition, 원자층 증착기
HVM ALD System for LARGE SIZE rigid panel (ex. CIGS PV)
Buffer layer deposition
High-throughput (>100 panels / System *hr) :
1 System has 8 chamber
1 chamber has 10 panel loading.(but variable up to 15 panels per requirement)
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